JPH0258348U - - Google Patents
Info
- Publication number
- JPH0258348U JPH0258348U JP1988137142U JP13714288U JPH0258348U JP H0258348 U JPH0258348 U JP H0258348U JP 1988137142 U JP1988137142 U JP 1988137142U JP 13714288 U JP13714288 U JP 13714288U JP H0258348 U JPH0258348 U JP H0258348U
- Authority
- JP
- Japan
- Prior art keywords
- gate
- floating gate
- sidewall floating
- control gate
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000012535 impurity Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988137142U JPH0258348U (en]) | 1988-10-20 | 1988-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988137142U JPH0258348U (en]) | 1988-10-20 | 1988-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0258348U true JPH0258348U (en]) | 1990-04-26 |
Family
ID=31398299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988137142U Pending JPH0258348U (en]) | 1988-10-20 | 1988-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0258348U (en]) |
-
1988
- 1988-10-20 JP JP1988137142U patent/JPH0258348U/ja active Pending